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Edit by Andrew Bookholt

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[* black] Shown in this photo is the ST LYPR540AH Tri-axis MEMS gyroscope.
[* black] To achieve the linear displacement needed to sense movement, a plate called a proof mass is [link|http://en.wikipedia.org/wiki/Oscillate|oscillated] by capacitive actuators.
[* black] When the package is rotated about the X or Y axes (in the plane of the die surface), coriolis[link|http://en.wikipedia.org/wiki/Coriolis_effect|coriolis] forces cause the plate to move perpendicular to the die surface. When the package is rotated about the Z axis (perpendicular to the plane of the die surface), the resulting displacement of the mass is in the plane of the die surface.
[* black] When the package is rotated about the X or Y axes (in the plane of the die surface), coriolis[link|http://en.wikipedia.org/wiki/Coriolis_effect|coriolis] forces cause the plate to move perpendicular to the die surface. When the package is rotated about the Z axis (perpendicular to the plane of the die surface), the resulting displacement of the mass is in the plane of the die surface.