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[* black] Shown in this photo is the ST LYPR540AH Tri-axis MEMS gyroscope.
[* black] To achieve the linear displacement needed to sense movement, a plate called a proof mass is oscillated by capacitive actuators.
[* black] When the package is rotated about the X or Y axes (in the plane of the die surface), coriolis forces cause the plate to move perpendicular to the die surface. When the package is rotated about the Z axis (perpendicular to the plane of the die surface), the resulting displacement of the mass is in the plane of the die surface.
[* black] Capacitive plates between the proof mass and the oscillator base produce a small change in capacitance as the proof mass moves in response to rotation about the X, Y, or Z axes.
[* black] Capacitors store electrical charge between two setsa pair of parallel plates, and that charge induces a mechanical force between the plates. This effect is used by the driving capacitive plates to produce oscillation. The opposite of this effect is used by the sensing capacitive plates to produce a change in capacitance when the plates move apart.
[* black] Capacitors store electrical charge between two setsa pair of parallel plates, and that charge induces a mechanical force between the plates. This effect is used by the driving capacitive plates to produce oscillation. The opposite of this effect is used by the sensing capacitive plates to produce a change in capacitance when the plates move apart.