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[* black] Shown in this photothese photos is the ST LYPR540AH Tri-axis MEMS gyroscopegyroscope, shot by a scanning electron microscope ([link|http://en.wikipedia.org/wiki/Scanning_electron_microscope|SEM]).
[* black] To achieveMEMS devices require extremely complicated and sensitive [link|http://en.wikipedia.org/wiki/Microelectromechanical_systems#MEMS_manufacturing_technologies|manufacturing procedures] to produce the linear displacementkind of accuracy needed to sense movement, a plate called a proof mass is [link|http://en.wikipedia.org/wiki/Oscillate|oscillated] by capacitive actuatorsfor reliable sensors.
[* black] When the package is rotated about the X or Y axes (in the planeMost MEMS devices require a combination of deposition of a film layer, patterning to mask off areas of the die surface), [link|http://en.wikipedia.org/wiki/Coriolis_effect|coriolis] forces cause the platedeposited film to move perpendicularremain after etching, and etching to the die surface. When the package is rotated about the Z axis (perpendicularremove excess metallic film to achieve the plane of the die surface), the resulting displacement of the mass is in the plane of the die surfacefinal product.
[* black] Shown in this photothese photos is the ST LYPR540AH Tri-axis MEMS gyroscopegyroscope, shot by a scanning electron microscope ([link|http://en.wikipedia.org/wiki/Scanning_electron_microscope|SEM]).
[* black] To achieveMEMS devices require extremely complicated and sensitive [link|http://en.wikipedia.org/wiki/Microelectromechanical_systems#MEMS_manufacturing_technologies|manufacturing procedures] to produce the linear displacementkind of accuracy needed to sense movement, a plate called a proof mass is [link|http://en.wikipedia.org/wiki/Oscillate|oscillated] by capacitive actuatorsfor reliable sensors.
[* black] When the package is rotated about the X or Y axes (in the planeMost MEMS devices require a combination of deposition of a film layer, patterning to mask off areas of the die surface), [link|http://en.wikipedia.org/wiki/Coriolis_effect|coriolis] forces cause the platedeposited film to move perpendicularremain after etching, and etching to the die surface. When the package is rotated about the Z axis (perpendicularremove excess metallic film to achieve the plane of the die surface), the resulting displacement of the mass is in the plane of the die surfacefinal product.

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