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[* black] MEMS devices require extremely complicated and sensitive manufacturing procedures to produce the micron-levelkind of accuracy needed for reliable sensors.
[* black] MEMS devices require extremely complicated and sensitive manufacturing procedures to produce the micron-levelkind of accuracy needed for reliable sensors.
[* black] Most MEMS devices require a combination of deposition of a film layer, patterning to mask off areas of the deposited film to remain after etching, and etching to remove excess metallic film to achieve the final product.
[* black] The image you see in this step is an Invensense ITG3200 3-axis gyroscope.